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Electric heating film application - semiconductor manufacturing
St. Berlin is an expert in thermal design of components for the semiconductor industry. Heat is a critical factor in the processing and testing of semiconductors. High levels of available heat allow faster throughput. A device that reduces temperature gradients across the heater, less variation across the wafer and thus higher yield. Heating elements that are less prone to failure reduce the risk of downtime. All of this translates into productivity and profits. Minco's flexible heater technology can help you achieve your thermal design goals.
Application examples: high power
plasma etching system , fast warm-up heater detection station uniform heating silicon wafer clamp IC test processing equipment factory installed heater photoresist rail system multi-zone heater


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